Business Areas

Based on vacuum, Thermal, and automation technologies, we have been operating the industrial machinery business in the areas of secondary battery, solar, display/clean logistics,
factory automation, and robotics. We are taking an aspiring leap as a global leader in comprehensive process equipment and smart solutions, by expanding the high value business-oriented portfolio
and overseas market, cutting edge equipment and strengthening our competencies in manufacturing and software development.

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Solar

Based on the vacuum deposition technology which is the key technology of the solar cell processing system,
we have been manufacturing specialized equipment in the solar cell and module areas while holding the ability to
perform the turnkey project for high quality and high-efficiency cell/module manufacturing equipment.

  • PECVD (SiNx)
    PECVD (SiNx)
    This machine is designed to apply the anti-reflective coating to the surface of crystalline silicon wafers to reduce reflection for its cell efficiency maximization.

    Spec

    • High Throughput: 6,776 wafers/hr (640 wafers/boat)
    • Cycle Time: 34 min
    • Uptime: 97%
  • T-AlOx (AlOx + SiNx)
    T-AlOx (AlOx + SiNx)
    This machine is designed to apply AlOx and SiNx layer to the rear side of wafers, which will enhance the recombination rate to increase its cell efficiency by minimizing the back-transmitted light and maximizing the light reflection.

    Spec

    • High Throughput: 5,485 wafers/hr (640 wafers/boat)
    • Cycle Time: 42 min
    • Uptime: 97%
  • T-aSi (Oxidation + a-Si)
    T-aSi (Oxidation + a-Si)
    This system is used for in-situ oxide and poly deposition for TOPCon cell which enables the selective capture of electrons by improving its recombination rate.

    Spec

    • High Throughput: 4,702 wafers/hr (640 wafers/boat)
    • Cycle Time: 49 min
    • Uptime: 97%
  • ALD (AlOx)
    ALD (AlOx)
    This equipment increases the efficiency by depositing an Al2O3 thin film on the front surface of the wafer of a crystalline solar cell by the thermal Atomic Layer Deposition (ALD) to form a passivation layer.

    Spec

    • High Throughput: 12,800 wafers/hr (1,600 wafers/boat)
    • Cycle Time: 30 min
    • Uptime: 97%
  • Diffusion Furnace (LP)
    Diffusion Furnace (LP)
    This machine is designed to dope Phosphorous and Boron to form “p-n junction,” a critical component of crystalline silicon solar cells.

    Spec

    POCl₃
    • High Throughput: 7,854 wafers/hr (2,400 wafers/boat)
    • Cycle Time: 110 min
    • Uptime: 99%
    BBr₃
    • High Throughput: 3,600 wafers/hr (2,400 wafers/boat)
    • Cycle Time: 240 min
    • Uptime: 99%
  • Oxidation Furnace (LP)
    Oxidation Furnace (LP)
    This machine is designed to improve the cell efficiency by applying a passivation layer on the front side of the silicon wafer after Edge Isolation and PSG removal.

    Spec

    • High Throughput: 14,400 wafers/hr (2,400 wafers/boat)
    • Cycle Time: 60min
    • Uptime: 99%
  • Automatic Tabbing Machine
    Automatic Tabbing Machine
    This high-speed automatic tabbing machine is capable of producing 3,600 cells per hour. Using a high-frequency soldering method, it reduces cell cracking and can flexibly adjust to different module production lines for cells of different sizes.

    Spec

    • Throughput : 3,600cell/hr
    • Breakage Rate of Cells ≤ 0.3%
    • Equipment Operational Rate ≥ 95%
    • Cell Spec : Available 5”, 6” Cell, 3,4,6 and multi bus bar
    • Cells Interval Between Strings : 0~5mm Adjustable
    • String of 8 to 12cells
    • IR Lamp Type Soldering
    • Equipment Size(mm) : 7,500L x 2,000W x 2,560H
  • Laminator Laminator
    Laminator
    Using vacuum pressing and heat treatment, this machine stabilizes glass, EV sheets, solar cells, and back sheet layers for module production.

    Spec

    • Low-cost, high-efficiency, and high-productivity (3 & 4step Laminator)
    • Yield ≥ 99.8%
    • Uptime ≥ 98%
    • M10 120/132/144/156HC
    • M12 110/120/150/160HC
  • Automation
    Automation
    This system is designed to ensure the efficient use of space and personnel for maximized productivity. It comes in semi-auto and full-auto versions, allowing users to take advantage of the merits of both automatic and manual work.

    Spec

    • Yield ≥ 99.5%
    • Uptime ≥ 91%
    • Average Tact Time: ≤17sec (72 cell/module)
    • Capacity: ≥ 4,600 Modules (72 cell/module)
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