Business Areas

Based on vacuum, Thermal, and automation technologies, we have been operating the industrial machinery business in the areas of secondary battery, solar, display/clean logistics,
factory automation, and robotics. We are taking an aspiring leap as a global leader in comprehensive process equipment and smart solutions, by expanding the high value business-oriented portfolio
and overseas market, cutting edge equipment and strengthening our competencies in manufacturing and software development.

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Display/Clean Logistics

The Display/Clean logistics equipment is automation equipment specialized in clean manufacturing.
It provides a clean automation total solution optimized for customer requirements with
particle control and high-speed & low-vibration design technology.

In the case of displays, we have been consistently producing and supplying production equipment through
our endless research and development that covers the CRT, PDP, LCD, and OLED. Especially,
the IR Clean Oven holds the greatest market share globally with its highly differentiated technology.

  • IR CLEAN OVEN for LCD
    IR CLEAN OVEN for LCD
    It is an oven for heating, drying, and the burning of the LCD plate with the IR heater, and its main purpose during the LCD manufacturing process is burning and drying after cleaning at the end of printing the photoresist, polyimide, etc. From the small to 8G glass, it has obtained various kinds of experiences and records so that it is supplied to every kind of customer both domestically and internationally. Due to the use of the IR heater and air distribution system with excellent performances, it is possible to realize high precision temperature control and outstanding outgassing, and other strengths of this equipment include a high purity level (class 10), maintainability, small installation place, low operating cost, etc..
  • IR CLEAN OVEN for OLED
    IR CLEAN OVEN for OLED
    It is an oven for heating, drying, and burning of the OLED plate with the IR heater, and its main purpose during the OLED manufacturing process is burning and drying after cleaning. This equipment holds the greatest market share in the world as it is the most suitable for the OLED burning process. Due to the use of the IR heater and air distribution system with excellent performances, it is possible to realize high precision temperature control and outstanding outgassing, and other strengths of this equipment include the high purity level (class 10), maintainability, small installation place, low operating cost, etc. In addition, the latest process technology trend, O2 concentration control, can be implemented.
  • Clean Stocker (Glass Cassette)
    Clean Stocker (Glass Cassette)
    It is a display clean automation equipment that store/preserve/transport Glass Cassette and can be implemented according to customer requirements.

    Spec

    • Environment Cleanness: Class10~Class1000
    • Pay Load: Max. 1,000kg
    • Velocity: Max. 3.5m/sec
    • Fork Loading Time: within 11
  • BRC (OCS : Overhead Conveyor System)
    BRC (OCS : Overhead Conveyor System)
    It is a display clean automation equipment that transport Glass Cassette between logistics equipment and can be implemented according to customer requirements.

    Spec

    • Environment Cleanness : Class10~Class1000
    • Pay Load : Max. 1,000kg
    • Velocity : Max. 2m/sec
  • Clean Lifter
    Clean Lifter
    It is a display clean automation equipment that transport Glass Cassette between floors and can be implemented according to customer requirements.

    Spec

    • Environment Cleanness : Class10~Class1000
    • Pay Load : Max. 1,000kg
    • Velocity : Max. 2m/sec
    • Height : Max. 90m
  • Clean Stocker (Wafer FOUP & FOSB & POD & Cassette)
    Clean Stocker (Wafer FOUP & FOSB & POD & Cassette)
    This auto storage system is for the clean logistics system for semiconductors, which stores and sorts the wafer FOUP, FOSB, POD, and cassette. It can be implemented in various types of forms such as a chamber type, rack type and others that suit the required specifications of different semiconductor processes.

    Spec

    • Environment Cleanness: Class1 ~ Class1000
    • Velocity: 1.5m/sec
    • Acc/Dec: 2.5m/sec²
    • Vibration: Not greater than RMS 0.5 G
    • Purge: PN2 purge at all times
    • Environment Control: Humidity, Temperature, Pressure, oxygen concentration
  • Clean Lifter
    Clean Lifter
    Being the clean logistics system for semiconductors, it is an auto lift & storage system that transfers the wafer FOUP&FOSB to each floor.

    Spec

    • Lifting Stroke: Max 60m
    • Lift Velocity: 360m/min
    • Fork Loading Time: Within 3sec
    • Acc/Dec: 2m/sec²
    • Vibration: Not greater than RMS 0.8G
  • AGV(Mobile Robot)
    AGV(Mobile Robot)
    Based on diverse platforms and self-developed control technologies for the automation of the manufacturing process, we have commercialized the AGV (Automated Guided Vehicle), where the mobile robot is comprised of the driving part and the collaborative robot that are optimized to handling small goods.

    Spec

    • Speed: 1.0 m/s
    • Drive Wheel Type: 2 Differential Drive, 4 Caster (Customizing)
    • Navigation Type: Laser-Reflector, Automatic Driving Technology (SLAM), QR Code-Vision Guide
    • Communication: Wireless LAN
    • Battery: LiFePO4
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