Business Areas

We have been operating the industrial machinery system that is centered on the vacuum deposition technology,
heat technology, logistics, and S/W competence. By expanding the high value business-oriented portfolio and overseas
market along with strengthening our technical capabilities, we are taking an aspiring leap as a leader of the global automation engineering solution.

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Semiconductor/Display

For semiconductors, together with the high purity automated logistics system that specializes
in the clean logistics manufacturing process, based on our particle control and high-speed & low vibration design technology,
we provide the total solutions in clean type automated logistics optimized to customer requirements.

In the case of displays, we have been consistently producing and supplying production equipment through
our endless research and development that covers the CRT, PDP, LCD, and OLED. Especially,
the IR Clean Oven holds the greatest market share globally with its highly differentiated technology.

  • Clean Stocker (Wafer FOUP & FOSB & POD & Cassette)
    Clean Stocker (Wafer FOUP & FOSB & POD & Cassette)
    This auto storage system is for the clean logistics system for semiconductors, which stores and sorts the wafer FOUP, FOSB, POD, and cassette. It can be implemented in various types of forms such as a chamber type, rack type and others that suit the required specifications of different semiconductor processes.

    Spec

    • Environment Cleanness: Class1 ~ Class1000
    • Velocity: 1.5m/sec
    • Acc/Dec: 2.5m/sec²
    • Vibration: Not greater than RMS 0.5 G
    • Purge: PN2 purge at all times
    • Environment Control: Humidity, Temperature, Pressure, oxygen concentration
  • Clean Lifter
    Clean Lifter
    Being the clean logistics system for semiconductors, it is an auto lift & storage system that transfers the wafer FOUP&FOSB to each floor.

    Spec

    • Lifting Stroke: Max 60m
    • Lift Velocity: 360m/min
    • Fork Loading Time: Within 3sec
    • Acc/Dec: 2m/sec²
    • Vibration: Not greater than RMS 0.8G
  • AGV(Mobile Robot)
    AGV(Mobile Robot)
    Based on diverse platforms and self-developed control technologies for the automation of the manufacturing process, we have commercialized the AGV (Automated Guided Vehicle), where the mobile robot is comprised of the driving part and the collaborative robot that are optimized to handling small goods.

    Spec

    • Speed: 1.0 m/s
    • Drive Wheel Type: 2 Differential Drive, 4 Caster (Customizing)
    • Navigation Type: Laser-Reflector, Automatic Driving Technology (SLAM), QR Code-Vision Guide
    • Communication: Wireless LAN
    • Battery: LiFePO4
  • IR CLEAN OVEN for LCD
    IR CLEAN OVEN for LCD
    It is an oven for heating, drying, and the burning of the LCD plate with the IR heater, and its main purpose during the LCD manufacturing process is burning and drying after cleaning at the end of printing the photoresist, polyimide, etc. From the small to 8G glass, it has obtained various kinds of experiences and records so that it is supplied to every kind of customer both domestically and internationally. Due to the use of the IR heater and air distribution system with excellent performances, it is possible to realize high precision temperature control and outstanding outgassing, and other strengths of this equipment include a high purity level (class 10), maintainability, small installation place, low operating cost, etc..
  • IR CLEAN OVEN for OLED
    IR CLEAN OVEN for OLED
    It is an oven for heating, drying, and burning of the OLED plate with the IR heater, and its main purpose during the OLED manufacturing process is burning and drying after cleaning. This equipment holds the greatest market share in the world as it is the most suitable for the OLED burning process. Due to the use of the IR heater and air distribution system with excellent performances, it is possible to realize high precision temperature control and outstanding outgassing, and other strengths of this equipment include the high purity level (class 10), maintainability, small installation place, low operating cost, etc.
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